产品展示 首页 > 产品展示 > 光学元件 > Lambda准分子激光镜片 

产品名称:ArF(193nm)准分子激光器腔镜
产品型号:准分子激光器腔镜

Specifications

Material:
VUV grade MgF2,
VUV grade CaF2
Surface Quality:
< 20 / 10
Radius of Curvature:
Surface Flatness:
< λ / 10 @ 633 nm
Diameter Tolerance:
< + 0.00 / - 0.20 mm
Thickness Tolerance:
< ± 0.25 mm
Clear Aperture:
> 85% of diameter
Damage Threshold:
> 1.2 J /cm², 10 ns
Durability:
Meet adhesion and abrasion per MIL-C-675
MgF2 CaF2 Diameter Thickness (mm) Runp
Rear Cavity Mirror
XRM-1203M-193 XRM-1203CU-193 0.50” 3.0 >97%
XRM-2003M-193 XRM-2003CU-193 20mm 3.6 >97%
XRM-2503M-193 XRM-2503CU-193 1.00” 3.0 >97%
XRM-3605M-193 XRM-3605CU-193 36 mm 5.5 >97%
XRM-3805M-193 XRM-3805CU-193 1.50” 5.5 >97%
XRM-5009M-193 XRM-5009CU-193 2.00” 9.5 >97%
Output Coupler
XOC-1203M-*R-193 XOC-1203CU-*R-193 0.50” 3.0 *
XOC-2003M-*R-193 XOC-2003CU-*R-193 20 mm 3.6 *
XOC-2503M-*R-193 XOC-2503CU-*R-193 1.00” 3.0 *
XOC-3605M-*R-193 XOC-3605CU-*R-193 36 mm 5.5 *
XOC-3805M-*R-193 XOC-3805CU-*R-193 1.50” 5.5 *
XOC-5009M-*R-193 XOC-5009CU-*R-193 2.00” 9.5 *
* Any percentage of reflection is available upon customer’s