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产品名称：ArF(193nm)准分子激光器反射镜
产品型号：ArF

 

Argon Fluoride laser optics for use at 193nm

Extra-Cavity Turning Mirrors
Normal or 45° incidence
High or partial reflectance

Specifications

Material:
Excimer grade Fused Silica
Surface Quality:
< 10 / 5
Radius of Curvature:
∞
Surface Flatness:
< λ / 10 @ 633 nm
Diameter Tolerance:
< + 0.00 / - 0.20 mm
Thickness Tolerance:
< ± 0.25 mm
Clear Aperture:
> 85% of diameter
Damage Threshold:
> 1.2 J /cm², 10 ns
Durability:
Meet adhesion and abrasion per MIL-C-675
Part No. Diameter (inch) Thickness (inch) Runp
0° High Reflector
XHR-1206U-193-0 0.50 0.250 >97%
XHR-1906U-193-0 0.75 0.250 >97%
XHR-2506U-193-0 1.00 0.250 >97%
XHR-3809U-193-0 1.50 0.375 >97%
XHR-5009U-193-0 2.00 0.375 >97%
45° High Reflector
XHR-1206U-193-45 0.50 0.250 >96%
XHR-1906U-193-45 0.75 0.250 >96%
XHR-2506U-193-45 1.00 0.250 >96%
XHR-3809U-193-45 1.50 0.375 >96%
XHR-5009U-193-45 2.00 0.375 >96%
Partial Reflector
XP-1206U-*R-193 0.50 0.250 *
XP-1906U-*R-193 0.75 0.250 *
XP-2506U-*R-193 1.00 0.250 *
XP-3809U-*R-193 1.50 0.375 *
XP-5009U-*R-193 2.00 0.375 *