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产品名称：XeCl(308nm)准分子激光器反射镜
产品型号：XeCl

 

Excimer Laser XeCI (308nm) Laser Mirrors

Extra-Cavity Turning Mirrors
Normal or 45° incidence
High or partial reflectance

Specifications

Material:
VUV grade Fused Silica
Surface Quality:
< 10 / 5
Radius of Curvature:
∞
Surface Flatness:
< λ / 10 @ 633 nm
Diameter Tolerance:
< + 0.00 / - 0.20 mm
Thickness Tolerance:
< ± 0.25 mm
Clear Aperture:
> 85% of diameter
Damage Threshold:
> 4 J / cm², 10 ns
Durability:
Meet adhesion & abrasion per MIL-C-675
Part No. Diameter (inch) Thickness (inch) Runp
0° High Reflector
XHR-1206U-308-0 0.50 0.250 >99.5%
XHR-1906U-308-0 0.75 0.250 >99.5%
XHR-2506U-308-0 1.00 0.250 >99.5%
XHR-3809U-308-0 1.50 0.375 >99.5%
XHR-5009U-308-0 2.00 0.375 >99.5%
XHR-7912U-308-0 3.00 0.500 >99.5%
45° High Reflector
XHR-1206U-308-45 0.50 0.250 >99%
XHR-1906U-308-45 0.75 0.250 >99%
XHR-2506U-308-45 1.00 0.250 >99%
XHR-3809U-308-45 1.50 0.375 >99%
XHR-5009U-308-45 2.00 0.375 >99%
XHR-7612U-308-45 3.00 0.500 >99%
Partial Reflector
XP-1206U-*R-308 0.50 0.250 *
XP-1906U-*R-308 0.75 0.250 *
XP-2506U-*R-308 1.00 0.250 *
XP-3809U-*R-308 1.50 0.375 *
XP-5009U-*R-308 2.00 0.375 *
XP-7612U-*R-308 3.00 0.500 *